DocumentCode :
3319768
Title :
Measurement of MEMS Displacements and Frequencies Using Laser Interferometry
Author :
Wylde, J. ; Hubbard, T.J.
Author_Institution :
DalTech. Dalhousie University
Volume :
3
fYear :
1999
fDate :
9-12 May 1999
Firstpage :
1716
Lastpage :
1721
Keywords :
Displacement measurement; Frequency measurement; Interferometry; Laser beams; Lenses; Mechanical engineering; Microelectromechanical systems; Micromechanical devices; Semiconductor device measurement; Vibration measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical and Computer Engineering, 1999 IEEE Canadian Conference on
Conference_Location :
Edmonton, Alberta, Canada
ISSN :
0840-7789
Print_ISBN :
0-7803-5579-2
Type :
conf
DOI :
10.1109/CCECE.1999.804976
Filename :
804976
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3319768
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