Metamaterial millimeter wave directional coupler on silicon substrate

Author

Sajin, Gheorghe ; Simion, Stefan ; Craciunoiu, Florea ; Bunea, Alina-Cristina ; Muller, Andrei A. ; Dinescu, Adrian

Author_Institution

Nat. Inst. for R&D in Microtechnol., Bucharest, Romania

Volume

01

fYear

2010

fDate

11-13 Oct. 2010

Firstpage

269

Lastpage

272

Abstract

This paper presents the design and manufacturing of a metamaterial Composite Right/Left Handed (CRLH) directional coupler on silicon substrate in coplanar waveguide (CPW) configuration, with a frequency band between 26-28 GHz. The design makes use of 4 CRLH cells, cascaded and coupled two by two in order to obtain the directional coupler structure. The device was processed on a 500μm thick silicon substrate with a Au/Cr metallization with the purpose of easy integration in more complex millimeter wave integrated circuits. The measurement of working frequency, reflection loss and isolation of the coupler validates the calculated values of these parameters.

Keywords

MIMIC; chromium; coplanar waveguide components; gold; integrated circuit metallisation; metamaterials; millimetre wave directional couplers; Au-Cr; Si; complex millimeter wave integrated circuits; composite right-left handed directional coupler; coplanar waveguide configuration; directional coupler structure; metallization; metamaterial millimeter wave directional coupler; reflection loss; silicon substrate; size 500 mum; working frequency; Coplanar waveguides; Directional couplers; Metamaterials; Silicon; Substrates; Transmission line measurements; coplanar waveguide; directional couplers; metamaterials;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference (CAS), 2010 International

Conference_Location

Sinaia

ISSN

1545-827X

Print_ISBN

978-1-4244-5783-0

Type

conf

DOI

10.1109/SMICND.2010.5650770

Filename

5650770