Vacuum systems laboratory development

Author

Hata, Davitl M.

Author_Institution

Microelectron. Technol., Portland Community Coll., OR, USA

Volume

3

fYear

1998

fDate

4-7 Nov. 1998

Firstpage

1343

Abstract

The implementation of new associate degree programs in semiconductor manufacturing at community colleges across the country has created a critical need for vacuum technology courses and supporting laboratories. Unfortunately few resources have been available to support technology-level courses in vacuum systems. This paper describes the results of a two-year project to develop a vacuum technology course, implement a vacuum systems laboratory, and provide faculty enhancement activities.

Keywords

educational courses; electronic engineering education; laboratories; semiconductor device manufacture; student experiments; vacuum apparatus; associate degree programs; community colleges; faculty enhancement activities; semiconductor manufacturing; technology-level courses; vacuum systems laboratory development; vacuum technology course; vacuum technology courses; Educational institutions; Fabrication; Laboratories; Leg; Materials science and technology; Microelectronics; Semiconductor device manufacture; Vacuum systems; Vacuum technology; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Frontiers in Education Conference, 1998. FIE '98. 28th Annual

Conference_Location

Tempe, AZ, USA

ISSN

0190-5848

Print_ISBN

0-7803-4762-5

Type

conf

DOI

10.1109/FIE.1998.738691

Filename

738691