Title :
Vacuum systems laboratory development
Author_Institution :
Microelectron. Technol., Portland Community Coll., OR, USA
Abstract :
The implementation of new associate degree programs in semiconductor manufacturing at community colleges across the country has created a critical need for vacuum technology courses and supporting laboratories. Unfortunately few resources have been available to support technology-level courses in vacuum systems. This paper describes the results of a two-year project to develop a vacuum technology course, implement a vacuum systems laboratory, and provide faculty enhancement activities.
Keywords :
educational courses; electronic engineering education; laboratories; semiconductor device manufacture; student experiments; vacuum apparatus; associate degree programs; community colleges; faculty enhancement activities; semiconductor manufacturing; technology-level courses; vacuum systems laboratory development; vacuum technology course; vacuum technology courses; Educational institutions; Fabrication; Laboratories; Leg; Materials science and technology; Microelectronics; Semiconductor device manufacture; Vacuum systems; Vacuum technology; Valves;
Conference_Titel :
Frontiers in Education Conference, 1998. FIE '98. 28th Annual
Conference_Location :
Tempe, AZ, USA
Print_ISBN :
0-7803-4762-5
DOI :
10.1109/FIE.1998.738691
