Simplified transmission photo-thermal radiometry for thermal diffusivity measurements in thin metal layers

Author

Yan Laijun ; Gao Chunming ; Ma Xingchen ; Zhao Binxing

Author_Institution

Sch. of Optoelectron. Inf., Univ. of Electron. Sci. & Technol. of China, Chengdu, China

Volume

2

fYear

2013

fDate

16-19 Aug. 2013

Firstpage

579

Lastpage

582

Abstract

Photo-thermal radiometry (PTR) technique in frequency domain is well known as an effective mean of non-destructive infrared detection. Conventional PTR technique is developed for thermal diffusivity determinations of thin metal layers. In this paper, a simplified transmission PTR technique for accurate thermal diffusivity measurement of thin metal layer is presented. The thermal diffusivity of Cu (10μm) and Al (27μm) determined by the simplified transmission PTR system is 83.13mm²/s and 78.02mm²/s, respectively. The goodness of fit analysis shows that the simplified transmission PTR system has high reliability and accuracy.

Keywords

aluminium; copper; infrared detectors; metallic thin films; nondestructive testing; radiometry; thermal diffusivity; Al; Cu; frequency domain; nondestructive infrared detection; simplified transmission photothermal radiometry; thermal diffusivity measurements; thin metal layers; Educational institutions; Integrated optics; Materials; Measurement by laser beam; Metals; Radiometry; Semiconductor device measurement; goodness of fit analysis; photo-thermal radiometry; thermal diffusivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Measurement & Instruments (ICEMI), 2013 IEEE 11th International Conference on

Conference_Location

Harbin

Print_ISBN

978-1-4799-0757-1

Type

conf

DOI

10.1109/ICEMI.2013.6743152

Filename

6743152