• DocumentCode
    3322630
  • Title

    Thin-film functional materials for portable microwave systems

  • Author

    Laister, A.J. ; James, C. ; Robertson, Ian D. ; Milne, S.J. ; Miles, R.E.

  • Author_Institution
    Inst. of Microwaves & Photonics, Univ. of Leeds, Leeds, UK
  • fYear
    2010
  • fDate
    21-21 April 2010
  • Firstpage
    53
  • Lastpage
    67
  • Abstract
    The presentation will focus on the exploratory work performed by the University of Leeds on behalf of the Flagship Consortium. The characterisation and patterning of thin-film Lead Zirconium Titanate (PZT) suitable for high-frequency RF systems will be discussed, and experimental results will be presented. A sub-wavelength parallel-plate capacitor configuration with laser-drilled micro via´s was fabricated using a single-mask photolithography method, and Sιι measurements were taken directly from the structure for a frequency range from 100MHz to 67GHz. A lumped-element model with fringing-field compensation was used to de-embed the material´s frequency-dependent relative permittivity and loss tangent values.
  • Keywords
    microwave materials; thin films; PZT; frequency-dependent relative permittivity; fringing-field compensation; high-frequency RF systems; laser-drilled micro via; lumped-element model; portable microwave systems; single-mask photolithography method; sub-wavelength parallel-plate capacitor configuration; thin-film functional materials;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Passive RF and Microwave Components, IET Seminar on
  • Conference_Location
    Birmingham
  • Type

    conf

  • DOI
    10.1049/ic.2010.0175
  • Filename
    6151894