DocumentCode
3322630
Title
Thin-film functional materials for portable microwave systems
Author
Laister, A.J. ; James, C. ; Robertson, Ian D. ; Milne, S.J. ; Miles, R.E.
Author_Institution
Inst. of Microwaves & Photonics, Univ. of Leeds, Leeds, UK
fYear
2010
fDate
21-21 April 2010
Firstpage
53
Lastpage
67
Abstract
The presentation will focus on the exploratory work performed by the University of Leeds on behalf of the Flagship Consortium. The characterisation and patterning of thin-film Lead Zirconium Titanate (PZT) suitable for high-frequency RF systems will be discussed, and experimental results will be presented. A sub-wavelength parallel-plate capacitor configuration with laser-drilled micro via´s was fabricated using a single-mask photolithography method, and Sιι measurements were taken directly from the structure for a frequency range from 100MHz to 67GHz. A lumped-element model with fringing-field compensation was used to de-embed the material´s frequency-dependent relative permittivity and loss tangent values.
Keywords
microwave materials; thin films; PZT; frequency-dependent relative permittivity; fringing-field compensation; high-frequency RF systems; laser-drilled micro via; lumped-element model; portable microwave systems; single-mask photolithography method; sub-wavelength parallel-plate capacitor configuration; thin-film functional materials;
fLanguage
English
Publisher
iet
Conference_Titel
Passive RF and Microwave Components, IET Seminar on
Conference_Location
Birmingham
Type
conf
DOI
10.1049/ic.2010.0175
Filename
6151894
Link To Document