Title :
Recent study of ion charge state distribution in vacuum arc ion sources
Author :
Bugaev, Alexey ; Gushenets, Vasiliy ; Nikolaev, Alexey ; Oks, Efim ; Anders, Andre ; Brown, Ian ; Yushkov, George
Author_Institution :
State Univ. of Control Syst. & Radioelectron., Tomsk, Russia
Abstract :
The results of research of factors which can influence the charge state distribution (CSD) of ions in vacuum arc plasmas are described. The CSD has been investigated using the time of flight (TOF) method. A strong influence of a magnetic field and the background pressure were observed. Here we summarize the results and discuss the influence of these parameters on the CSD of ion beams for the Mevva and Titan ion sources, and discuss possible approaches for increasing the ion charge states and the generation of hybrid gas-metal ion beams by sources
Keywords :
ion beams; ion sources; magnetic field effects; plasma diagnostics; plasma production; time of flight spectroscopy; vacuum arcs; Mevva ion source; Titan ion source; background pressure; hybrid gas-metal ion beams generation; ion beams; ion charge state distribution; ion charge states; magnetic field effects; time of flight method; vacuum arc ion sources; vacuum arc plasmas; Anodes; Cathodes; Fault location; Ion beams; Ion sources; Magnetic field measurement; Plasma measurements; Plasma sources; Vacuum arcs; Vacuum systems;
Conference_Titel :
Discharges and Electrical Insulation in Vacuum, 1998. Proceedings ISDEIV. XVIIIth International Symposium on
Conference_Location :
Eindhoven
Print_ISBN :
0-7803-3953-3
DOI :
10.1109/DEIV.1998.740620
