DocumentCode
332414
Title
Ion charge state distributions of alloy-cathode vacuum arc plasmas
Author
Schülke, Thomas ; Anders, André
Author_Institution
Res. & Dev. Dept., Chartered Semicond. Manuf. Ltd., Singapore
Volume
1
fYear
1998
fDate
17-21 Aug 1998
Firstpage
329
Abstract
Ion charge state distributions (CSDs) of alloy-cathode vacuum arc plasmas have been calculated under the assumption that thermodynamic equilibrium is valid in the vicinity of the cathode spot, and equilibrium CSDs “freeze” when the plasma is rapidly expanding. In this way, experimental data of titanium-hafnium alloy cathode plasmas have been simulated using a generalized system of Saha equations. It was found that the CSDs of titanium and hafnium freeze approximately at the same plasma temperature and density. The freezing parameters depend slightly on the cathode (i.e., plasma) composition. For the example considered, freezing occurs at temperature of T=3.0-3.8 eV and a total heavy (atom and ion) particle density of order 1025 m-3
Keywords
cathodes; electric charge; hafnium alloys; plasma density; plasma temperature; thermodynamics; titanium alloys; vacuum arcs; 3 to 3.8 eV; Saha equations; TiHf; alloy-cathode vacuum arc plasmas; cathode composition; cathode spot; freezing parameters; heavy particle density; ion charge state distributions; plasma density; plasma temperature; rapidly expanding plasma; thermodynamic equilibrium; Cathodes; Electrons; Equations; Ionization; Plasma density; Plasma materials processing; Plasma simulation; Plasma temperature; Plasma waves; Vacuum arcs;
fLanguage
English
Publisher
ieee
Conference_Titel
Discharges and Electrical Insulation in Vacuum, 1998. Proceedings ISDEIV. XVIIIth International Symposium on
Conference_Location
Eindhoven
ISSN
1093-2941
Print_ISBN
0-7803-3953-3
Type
conf
DOI
10.1109/DEIV.1998.740638
Filename
740638
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