• DocumentCode
    332414
  • Title

    Ion charge state distributions of alloy-cathode vacuum arc plasmas

  • Author

    Schülke, Thomas ; Anders, André

  • Author_Institution
    Res. & Dev. Dept., Chartered Semicond. Manuf. Ltd., Singapore
  • Volume
    1
  • fYear
    1998
  • fDate
    17-21 Aug 1998
  • Firstpage
    329
  • Abstract
    Ion charge state distributions (CSDs) of alloy-cathode vacuum arc plasmas have been calculated under the assumption that thermodynamic equilibrium is valid in the vicinity of the cathode spot, and equilibrium CSDs “freeze” when the plasma is rapidly expanding. In this way, experimental data of titanium-hafnium alloy cathode plasmas have been simulated using a generalized system of Saha equations. It was found that the CSDs of titanium and hafnium freeze approximately at the same plasma temperature and density. The freezing parameters depend slightly on the cathode (i.e., plasma) composition. For the example considered, freezing occurs at temperature of T=3.0-3.8 eV and a total heavy (atom and ion) particle density of order 1025 m-3
  • Keywords
    cathodes; electric charge; hafnium alloys; plasma density; plasma temperature; thermodynamics; titanium alloys; vacuum arcs; 3 to 3.8 eV; Saha equations; TiHf; alloy-cathode vacuum arc plasmas; cathode composition; cathode spot; freezing parameters; heavy particle density; ion charge state distributions; plasma density; plasma temperature; rapidly expanding plasma; thermodynamic equilibrium; Cathodes; Electrons; Equations; Ionization; Plasma density; Plasma materials processing; Plasma simulation; Plasma temperature; Plasma waves; Vacuum arcs;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Discharges and Electrical Insulation in Vacuum, 1998. Proceedings ISDEIV. XVIIIth International Symposium on
  • Conference_Location
    Eindhoven
  • ISSN
    1093-2941
  • Print_ISBN
    0-7803-3953-3
  • Type

    conf

  • DOI
    10.1109/DEIV.1998.740638
  • Filename
    740638