A superprecision measuring method and the corresponding measuring system for error movement of instrument spindles

The authors analyze the principal defect in the multi-step method, the traditional error separating method for error movement of instrument spindles, and present a novel error separating method, the combined multi-step method. Using the novel technique, one can get rid of the `blind spectrum´ which is unavoidable when using the former method. The measuring times using the new method and those using the traditional one are generally the same. Based on the combined multi-step method, a measuring and controlling system for separating the error movement of instrument spindles has been established