Title :
Field emission vacuum power switch using vertically aligned carbon nanotubes
Author :
Rupesinghe, N.L. ; Chhowalla, M. ; Teo, K.B.K. ; Amaratunga, G.A.J.
Author_Institution :
Dept. of Eng., Cambridge Univ., UK
Abstract :
A field emission vacuum switch using vertically aligned carbon nanotubes (VACNT) grown by a direct current plasma enhanced chemical vapour deposition (DC PECVD) is reported. Cathodes with optimised field emission properties were evaluated in a diode configuration as a test vehicle for the construction of a vacuum power three terminal triode
Keywords :
carbon nanotubes; cathodes; electron field emission; plasma CVD; space charge; triodes; vacuum microelectronics; vacuum switches; 10 mA; C; DC PECVD; Fowler-Nordheim plots; VACNT; cathodes; diode configuration; direct current plasma enhanced chemical vapour deposition; emission current; field emission vacuum power switch; optimised field emission properties; space charge effects; vacuum power three terminal triode; vertically aligned carbon nanotubes; Carbon dioxide; Carbon nanotubes; Cathodes; Chemical vapor deposition; Diodes; Plasma chemistry; Plasma properties; Switches; Testing; Vehicles;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939624
