DocumentCode
3326258
Title
Study of gas sensor with carbon nanotube film on the substrate of porous silicon
Author
Zhang, Yong ; Liu, Junhua ; Li, Xin ; Dou, Juying ; Liu, Weihua ; He, Yongning ; Zhu, Changchun
Author_Institution
Dept. of Autom., Xi´´an Jiaotong: Univ., China
fYear
2001
fDate
2001
Firstpage
13
Lastpage
14
Abstract
A new method of obtaining extremely high electric fields in a very small region near the tip of a carbon nanotube, with diameter of nanometer order, is studied. This method makes the self-sustaining dark discharge voltage decrease to less than 220 V, which is in the safe range. The carbon nanotube array film is used as a cathode to form a new kind of gas sensor based on the gas discharge. The discharge current at room temperature and atmospheric pressure increases from the order of nanoamperes to that of microamperes. The electrical characteristics of several gases at atmospheric pressure are studied. The self-sustaining dark discharge voltages of different gases vary, as do the discharge currents. Porous silicon is selected as the substrate for the carbon nanotubes. This can improve the adhesion of the nanotube on the substrate and so prolong the lifetime of the cathode
Keywords
carbon nanotubes; cathodes; discharges (electric); elemental semiconductors; gas sensors; porous semiconductors; silicon; vacuum microelectronics; 220 V; C nanotube array film; C-Si; Si; adhesion; atmospheric pressure; carbon nanotube film; cathode; discharge current; electric conductance; extremely high electric fields; gas concentration; gas sensor; nanometer order diameter; porous silicon substrate; room temperature; self-sustaining dark discharge voltage; Carbon nanotubes; Cathodes; Discharges; Electric variables; Gas detectors; Gases; Sensor arrays; Substrates; Temperature sensors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location
Davis, CA
Print_ISBN
0-7803-7197-6
Type
conf
DOI
10.1109/IVMC.2001.939629
Filename
939629
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