Emission properties of carbon nanotubes grown on various catalytic layer-coated glass using plasma enhanced chemical vapor deposition with CO

Author

Jae-Hee Han ; Choi, Sun Hong ; Tae Yong Lee ; Yoo, Ji-Beom ; Chong-Yun Park ; Jung, T.W. ; Kim, H.J. ; Park, Y.J. ; Han, I.T. ; Huh, J.N. ; Lee, J.H. ; Yu, SeGi ; Yi, W.K. ; Park, G.S. ; Lee, N.S. ; Kim, J.M.

Author_Institution

Center for Nanotubes & Nanostructured Composite, Sung Kyun Kwan Univ., Suwon, South Korea

fYear

2001

fDate

2001

Firstpage

33

Lastpage

34

Abstract

Vertically aligned carbon nanotube´s (CNTs) were grown on various catalytic metal coated glass substrate using plasma enhanced chemical vapor deposition (PECVD) with CO and NH₃ as a carbon source and dilution and catalytic gas, respectively. Effects of growth parameters and catalytic layers on the emission properties of CNTs were investigated. CNTs on the Fe catalytic layer showed the low turn-on electric field (E_to) of 1.75 V/μm while CNT grown on invar under the same condition showed larger E_to. Growth conditions and catalytic layer were optimized for the enhancement of emission characteristics of CNTs

Keywords

carbon nanotubes; catalysts; electron field emission; plasma CVD coatings; C; CO; Fe; Fe-Ni; NH₃; carbon nanotubes; catalytic metal coating; field emission; glass substrate; invar; iron; plasma enhanced chemical vapor deposition; turn-on electric field; Carbon dioxide; Carbon nanotubes; Chemical vapor deposition; Chromium; Electron emission; Glass; Iron; Plasma chemistry; Plasma properties; Plasma temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International

Conference_Location

Davis, CA

Print_ISBN

0-7803-7197-6

Type

conf

DOI

10.1109/IVMC.2001.939639

Filename

939639