Title :
Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle
Author :
Payam, Amir Farrokh ; Hassani, Faezeh Arab ; Fathipour, Morteza
Author_Institution :
Fac. of Electr. & Comput. Eng., Univ. of Tehran, Tehran
Abstract :
This paper presents a novel hybrid control algorithm for the conventional capacitive MEMS accelerometer. This scheme is realized by adding a backstepping controller to a conventional PID closed loop system to achieve higher stability and higher dynamic range and to prevent pull-in phenomena by preventing linger displacement from passing a maximum preset value. The analysis of convergence and resolution show that while the proposed control scheme satisfies these criteria it also keeps resolution performance better than what is normally obtained in conventional PID controllers. The performance of the proposed hybrid controller investigated here is validated by computer simulation.
Keywords :
accelerometers; capacitive sensors; closed loop systems; microsensors; backstepping controller; capacitive MEMS accelerometer; hybrid closed loop control system; hybrid controller; Accelerometers; Backstepping; Closed loop systems; Control systems; Displacement control; Dynamic range; Micromechanical devices; Performance analysis; Stability; Three-term control; MEMS accelerometer; PID controller; backstepping controller; closed loop control;
Conference_Titel :
Microelectronics, 2007. ICM 2007. Internatonal Conference on
Conference_Location :
Cairo
Print_ISBN :
978-1-4244-1846-6
Electronic_ISBN :
978-1-4244-1847-3
DOI :
10.1109/ICM.2007.4497696