Title :
Materials deposition and emission characteristics of NbC/Nb field emitter array cathodes
Author :
Mackie, W.A. ; Cabe, G.L. ; Southall, L.A. ; Xie, Tianbao ; McClelland, P.H.
Author_Institution :
Appl. Phys. Technologies, Inc, McMinnville, USA
Abstract :
Fabrication and emission testing of NbC on Nb field emitter array cathodes is reported. Currents in excess of 50 μA per single array tip were obtained in 10-7 Torr ambient pressures
Keywords :
cathodes; electron field emission; niobium; niobium compounds; vacuum deposition; vacuum microelectronics; 10-7 torr; Nb; NbC-Nb; NbC/Nb; emission characteristics; field emitter array cathodes; materials deposition; vapour deposition; Apertures; Cathodes; Crystalline materials; Field emitter arrays; Geometry; Niobium compounds; Physics; Sputtering; Stability; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939671
