Title :
Controlled field emission from bare and metal coated Si tip arrays
Author :
Günther, B. ; Kaldasch, F. ; Müller, G. ; Schmitt, S. ; Henning, T. ; Huber, R. ; Lacher, M.
Author_Institution :
Fachbereich Phys., Bergische Univ., Wuppertal, Germany
Abstract :
The field emission results of bare and metal-coated Si tip arrays demonstrate their potential for electron beam applications. The observed trade-off between low operating voltages and emission stability can be understood as the smoothing effect of the bare Si tips by the metal coatings
Keywords :
electron beam focusing; electron field emission; elemental semiconductors; silicon; vacuum microelectronics; Si; Si tip arrays; bare tip arrays; controlled field emission; electron beam applications; emission stability; low operating voltage; metal-coated tip arrays; Anodes; Electron beam applications; Electron beams; Electron sources; Field emitter arrays; Fluctuations; Iron; Magnetic field measurement; Scanning electron microscopy; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939673
