DocumentCode
3326988
Title
High-current processing of microfabricated field emitters for improved emission uniformity from tip to tip
Author
Schwoebel, P.R. ; Spindt, C.A. ; Holland, C.E.
Author_Institution
Appl. Phys. Sci. Lab., SRI Int., Menlo Park, CA, USA
fYear
2001
fDate
2001
Firstpage
103
Lastpage
104
Abstract
We have shown that in situ tip self-heating by the emitted electron current can be used to make the current-voltage characteristics of microfabricated field emitter tips nearly identical to one another. The improved emission uniformity allows for more reliable array operation at increased electron emission current densities
Keywords
electron field emission; heat treatment; molybdenum; vacuum microelectronics; Mo; current-voltage characteristics; electron emission current density; high-current processing; improved emission uniformity; in situ tip self-heating; microfabricated field emitter tips; reliable array operation; Annealing; Cathodes; Current density; Current-voltage characteristics; Dielectric breakdown; Electron emission; Laboratories; Surface cleaning; Surface contamination; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location
Davis, CA
Print_ISBN
0-7803-7197-6
Type
conf
DOI
10.1109/IVMC.2001.939674
Filename
939674
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