Title :
High-current processing of microfabricated field emitters for improved emission uniformity from tip to tip
Author :
Schwoebel, P.R. ; Spindt, C.A. ; Holland, C.E.
Author_Institution :
Appl. Phys. Sci. Lab., SRI Int., Menlo Park, CA, USA
Abstract :
We have shown that in situ tip self-heating by the emitted electron current can be used to make the current-voltage characteristics of microfabricated field emitter tips nearly identical to one another. The improved emission uniformity allows for more reliable array operation at increased electron emission current densities
Keywords :
electron field emission; heat treatment; molybdenum; vacuum microelectronics; Mo; current-voltage characteristics; electron emission current density; high-current processing; improved emission uniformity; in situ tip self-heating; microfabricated field emitter tips; reliable array operation; Annealing; Cathodes; Current density; Current-voltage characteristics; Dielectric breakdown; Electron emission; Laboratories; Surface cleaning; Surface contamination; Temperature;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939674
