Emission stability of a FEA observed by an emission microscope

Author

Miyamoto, N. ; Yamane, K. ; Nakane, H. ; Adachi, H.

Author_Institution

Dept. of Electr. & Electron. Eng., Muroran Inst. of Technol., Japan

fYear

2001

fDate

2001

Firstpage

105

Lastpage

106

Abstract

Emission stability is the most stringent requirement for FEA in a practical application. When the fluctuating events occur stochastically, the fluctuation in electron emission reduces with 1/√N, where N is number of individual cathodes. So the total current of FEA (Field Emitter Array) is expected apparently stable. However, the fluctuation does not necessarily occur stochastically, and the mode of fluctuation of each individual micro-tip is different from tip to tip. Some emit very stable, but others fluctuate frequently. The fluctuation of each micro-tip is observed by use of a field emission microscope, and the behaviors are classified due to the emission mode. The causes of each emission modes are argued

Keywords

electron field emission; field emission electron microscopy; vacuum microelectronics; electron emission stability; field emission microscope; field emitter array; micro-tip fluctuations; Cathodes; Electron emission; Electron microscopy; Electrostatics; Equations; Field emitter arrays; Fluctuations; Fluorescence; Lenses; Stability;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International

Conference_Location

Davis, CA

Print_ISBN

0-7803-7197-6

Type

conf

DOI

10.1109/IVMC.2001.939675

Filename

939675