Title :
Low-field electron emission of Si micro-tip arrays produced by laser beam evaporation
Author :
Karabutov, A.V. ; Frolov, V.D. ; Simakin, A.V. ; Shafeev, G.A.
Author_Institution :
Gen. Phys. Inst., Acad. of Sci., Moscow, Russia
Abstract :
Low threshold field electron emission is reported of the periodical array of Si micro-tips produced by laser-assisted evaporation of a Si wafer in vacuum. Laser ablation of solids at sufficiently high fluence and number of laser pulses results in formation of the specific surface morphology. Namely, the surface is covered by a periodical array of micro-columns that protrude above the initial surface of the wafer for 10-20 μm. Typical SEM view of such a surface is presented in this paper
Keywords :
electron field emission; elemental semiconductors; laser ablation; scanning electron microscopy; silicon; vacuum microelectronics; SEM; Si; Si micro-tip array; field electron emission; laser ablation; laser beam evaporation; micro-columns; surface morphology; Electron emission; Laser ablation; Laser beams; Laser theory; Optical arrays; Scanning electron microscopy; Solid lasers; Surface emitting lasers; Surface morphology; Surface topography;
Conference_Titel :
Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
Conference_Location :
Davis, CA
Print_ISBN :
0-7803-7197-6
DOI :
10.1109/IVMC.2001.939680
