Title :
220 GHZ microfabricated sheet beam amplifier gratings
Author :
Joye, Colin D. ; Calame, Jeffrey P. ; Park, Doewon ; Bass, Robert ; Levush, Baruch ; Garven, Morag
Author_Institution :
Naval Res. Lab., Washington, DC, USA
Abstract :
Summary form only given. The NRL Microfabricated 220 GHz Vacuum Electronic Amplifiers project is aimed toward demonstrating a 50 watt CW output power slow-wave amplifier at 220 GHz based on a sheet electron beam. Slow-wave amplifiers are very compact owing to their intrinsically small electromagnetic circuit features. These small features, however, pose challenges for high power generation because of the high power densities required. As a material, copper has desirable properties for mmW vacuum electronics: Low mmW resistive loss, high thermal conductivity, ease of fabrication, and vacuum compatibility. A suite of microfabrication techniques is being developed in-house for accurately fabricating mmW structures from OFHC copper for high power density.
Keywords :
microfabrication; millimetre wave amplifiers; millimetre wave tubes; sputter etching; OFHC copper; deep reactive ion etching; electromagnetic circuit; frequency 220 GHz; high power density; high power generation; high thermal conductivity; low mm-wave resistive loss; microfabricated sheet beam amplifier gratings; microfabrication techniques; output power slow-wave amplifier; power 50 W; vacuum electronic amplifier project; Circuits; Conducting materials; Copper; Electron beams; Gratings; Power amplifiers; Power generation; Sheet materials; Thermal conductivity; Thermal resistance;
Conference_Titel :
Plasma Science, 2010 Abstracts IEEE International Conference on
Conference_Location :
Norfolk, VA
Print_ISBN :
978-1-4244-5474-7
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2010.5533906