The utmost abilities of alumina technology on formation of miniature active and passive elements of VICs [vacuum microelectronics]

Author

Mukhurov, N.I. ; Galdetskiy, A.V. ; Gasenkova, I.V. ; Kotova, I.F. ; Ryzhikov, I.A.

Author_Institution

Inst. of Electron., Acad. of Sci., Minsk, Belarus

fYear

2001

fDate

2001

Firstpage

171

Lastpage

172

Abstract

Test structures of thin-film (0.1 μm) Mo and W-Re strip systems on anodic alumina substrates have been investigated to form blade field emitters for a microwave minitron. It is possible to fabricate elements of less than 0.2 μm in size on these substrates with surface cleanness class of 10 to 11 in apparatus based on a scanning tunnelling microscope

Keywords

alumina; integrated circuit testing; microwave devices; scanning tunnelling microscopy; vacuum microelectronics; 0.1 micron; 0.2 micron; Al₂O₃; Mo-Al₂O₃; VICs; WRe-Al₂O₃; alumina technology; anodic alumina substrates; blade field emitters; element size; microwave minitron; miniature active elements; miniature passive elements; scanning tunnelling microscope-based apparatus; surface cleanness class; test structures; thin-film Mo strips; thin-film W-Re strips; vacuum ICs; Atomic force microscopy; Blades; Electronic equipment testing; Lithography; Rough surfaces; Substrates; Surface morphology; Surface roughness; Surface topography; System testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International

Conference_Location

Davis, CA

Print_ISBN

0-7803-7197-6

Type

conf

DOI

10.1109/IVMC.2001.939708

Filename

939708