DocumentCode :
3327637
Title :
A Novel VOx Thermosensitive Thin Film for Microbolometer Arrays
Author :
Chen, Xiqu ; Li, Jie
Author_Institution :
Dept. of Math. & Phys., Wuhan Polytech. Univ., Wuhan, China
fYear :
2011
fDate :
16-18 May 2011
Firstpage :
1
Lastpage :
3
Abstract :
In this paper, a novel VOx thermosensitive thin film is fabricated for microbolometer arrays. By adjusting the fabricating process parameters, some key thermoelectrical properties of the thin film can be well controlled. The designed and fabricated VOx thin film in our laboratory has excellent thermosensitive characteristics for infrared, and its temperature coefficient of resistance (TCR) value reaches -2.05%. Measurement of the thin film shows that the film is high absorptive for medium-wave infrared (MWIR) and Long-wave infrared (LWIR).
Keywords :
bolometers; dielectric thin films; optical arrays; optical design techniques; optical fabrication; optical films; thermo-optical effects; thermoelectricity; vanadium compounds; LWIR spectra; MWIR spectra; TCR; VOx; long-wave infrared absorption; medium-wave infrared absorption; microbolometer arrays; temperature coefficient of resistance; thermoelectrical properties; thermosensitive thin film; Films; Laboratories; Resistance; Silicon; Sputtering; Substrates; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Photonics and Optoelectronics (SOPO), 2011 Symposium on
Conference_Location :
Wuhan
ISSN :
2156-8464
Print_ISBN :
978-1-4244-6555-2
Type :
conf
DOI :
10.1109/SOPO.2011.5780577
Filename :
5780577
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3327637
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