DocumentCode
3329076
Title
Study on Optical Constant of Ultrathin Aluminum Films Deposited by Molecular Beam Epitaxy
Author
Gao Shang ; Lian Jie ; Song Ping ; Li Ping ; Ma Zheng ; Wang Xiao ; Wu Shiliang
Author_Institution
Shandong Univ., Jinan, China
fYear
2011
fDate
16-18 May 2011
Firstpage
1
Lastpage
4
Abstract
A set of ultrathin aluminum films (2-16nm) were deposited by molecular beam epitaxy technique. Their thickness dependence of optical properties were studied by a GES5 spectroscopic ellipsometer. The ellipsometry data were fit by using Drude and Lorenz model. Fitting results show that optical index of ultrathin aluminum films depend on the film thickness. But aluminum films with thickness of 2-3nm show different optical properties from other films.
Keywords
aluminium; metallic epitaxial layers; molecular beam epitaxial growth; refractive index; Al; Drude-Lorenz model; GES5 spectroscopic ellipsometer; molecular beam epitaxy; optical constant; optical index; optical properties; size 2 nm to 16 nm; ultrathin aluminum films; Adaptive optics; Aluminum; Data models; Optical buffering; Optical films; Optical sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics and Optoelectronics (SOPO), 2011 Symposium on
Conference_Location
Wuhan
ISSN
2156-8464
Print_ISBN
978-1-4244-6555-2
Type
conf
DOI
10.1109/SOPO.2011.5780641
Filename
5780641
Link To Document