Title :
IMEMS accelerometer testing-test laboratory development and usage
Author :
Beegle, Richard W. ; Brocato, Robert W. ; Grant, Ronald W.
Author_Institution :
Microsyst. Sci., Technol. & Components Centre, Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
An economical IMEMS accelerometer test lab was developed by adding acceleration stimulation equipment to an IC test lab. This paper will describe an R&D approach to testing these accelerometers. Descriptions and usage of the equipment are presented. Accelerometer pulse stream data and their analysis are described. A production test facility is being developed from this work
Keywords :
accelerometers; dynamic testing; microsensors; production testing; semiconductor device testing; test facilities; CMOS technology; IC test lab; IMEMS accelerometer testing; acceleration stimulation equipment; dynamic testing; integrated MEMS; positioning table; production test facility; pulse stream data; test laboratory development; Accelerometers; Clocks; Gravity; Integrated circuit testing; Laboratories; Power generation economics; Signal generators; Test equipment; Vibrations; Voltage;
Conference_Titel :
Test Conference, 1999. Proceedings. International
Conference_Location :
Atlantic City, NJ
Print_ISBN :
0-7803-5753-1
DOI :
10.1109/TEST.1999.805648
