DocumentCode
3329361
Title
Simultaneous Measurement of Surface Shape and Optical Homogeneity with Dual-Wavelength Phase-Shifting Digital Holography
Author
Zheng, Xiaoyi ; Wang, Yurong ; Li, Jie ; Meng, Xiangfeng ; Sun, Yubao ; Du, Yanlong
Author_Institution
Shandong Provincial Key Lab. of Laser Technol. & Applic., Shandong Univ., Jinan, China
fYear
2011
fDate
16-18 May 2011
Firstpage
1
Lastpage
4
Abstract
Based on the difference of refractive index by different wavelengths in optical components, a novel method for measuring the optical homogeneity of optical components by using dual-wavelength phase-shifting digital holography has been proposed and verified by computer simulation. Meanwhile, this method could measure the surface shape of optical components accurately while we do not need to measure the front surface and rear surface of sample separately. Furthermore, the phase of reference wave and phase distortion caused by the object wave could be eliminated automatically, so the method has a function of automated optical wavefront distortion compensation, which can improve the measurement accuracy.
Keywords
adaptive optics; holographic interferometry; optical distortion; phase shifting interferometry; refractive index measurement; surface topography measurement; automated optical wavefront distortion compensation; computer simulation; dual-wavelength phase-shifting digital holography; optical components; phase distortion; reference wave; refractive index; surface shape measurement; Holographic optical components; Holography; Optical distortion; Optical interferometry; Optical surface waves; Optical variables measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics and Optoelectronics (SOPO), 2011 Symposium on
Conference_Location
Wuhan
ISSN
2156-8464
Print_ISBN
978-1-4244-6555-2
Type
conf
DOI
10.1109/SOPO.2011.5780653
Filename
5780653
Link To Document