Plasma resistance of perfluoroelastomer and fluoroelastomer seals used in plasma environments

Author

Wang, S. ; Vigliotti, M. ; Legare, J.M. ; Sogo, S.

Author_Institution

DuPont Performance Polymers, Wilmington, DE, USA

fYear

2010

fDate

20-24 June 2010

Firstpage

1

Lastpage

1

Abstract

Plasma is a very versatile tool for many applications. Due to its high reactivity and harsh environments, sealing materials are crucial for safety, process stability and productivity. Seals made from perfluoroelastomers and fluoroelastomers are normally used in critical locations in plasma environment due to their extraordinary chemical inertness, high thermal stability and cleanness. Elastomeric sealing materials made from perfluoroelastomers and fluoroelastomers as well as other elastomers are studied in various plasma environments and plasma attack mechanism will be discussed.

Keywords

elastomers; plasma applications; sealing materials; elastomeric sealing materials; fluoroelastomer seals; perfluoroelastomer seals; plasma attack mechanism; plasma environments; plasma resistance; Chemicals; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma stability; Product safety; Productivity; Sealing materials; Seals; Thermal stability;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 2010 Abstracts IEEE International Conference on

Conference_Location

Norfolk, VA

ISSN

0730-9244

Print_ISBN

978-1-4244-5474-7

Electronic_ISBN

0730-9244

Type

conf

DOI

10.1109/PLASMA.2010.5534027

Filename

5534027