Title :
Excimer-lasers in an industrial fabrication line
Author :
Bachmann, Friedrich G.
Author_Institution :
Siemens AG
Abstract :
Summary form only given. The fabrication of contact openings found in a 16 layer highly integrated printed circuit board for a new high speed computer is truly the first known example of using KrF excimer lasers in a large scale industrial manufacturing application. This slide presentation will report about the product, the manufacturing process and the first year experience with the manufacturing systems running on a three shift basis.
Keywords :
Application software; Computer aided manufacturing; Computer industry; Integrated circuit packaging; Large-scale systems; Logistics; Manufacturing industries; Optical device fabrication; Production; Textile industry;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-87942-550-4
DOI :
10.1109/LEOS.1990.690475
