High repetition-rate, low jitter pulsed power generator for excimer laser applications

Author

Jiang, Weihua ; Matsuda, Takuya ; Yatsui, Kiyoshi ; Tokuchi, Akira

Author_Institution

Extreme Energy-Density Res. Inst., Nagaoka Univ. of Technol., Japan

fYear

2002

fDate

30 June-3 July 2002

Firstpage

605

Lastpage

607

Abstract

A high repetition-rate pulsed power generator, which uses IGBT as the main switch, has been developed. It generates high-voltage output of 28 kV that can charge a capacitive load of 12 nF in 100 ns. It can be operated at the repetition rate of 6 kHz. A special technique has been applied to the control circuit so that the main storage capacitor is always charged at a constant voltage, even when the output voltage of the charging unit varies for 20%. As a result the timing of the output voltage pulse is stabilized within a range of several nanoseconds. This level of low jitter is considered to be required by the pulsed power supplies for the short-wavelength excimer lasers.

Keywords

capacitor storage; excimer lasers; insulated gate bipolar transistors; jitter; laser accessories; power semiconductor switches; pulse generators; pulsed power supplies; pulsed power switches; 100 ns; 12 nF; 28 kV; 6 kHz; De-Qing switch; IGBT; capacitive load charging; control circuit; excimer laser; high repetition-rate pulsed power generator; high-voltage output; low jitter pulsed power generator; output voltage pulse timing; pulsed power supplies; repetition rate; short-wavelength excimer lasers; storage capacitor; Circuits; Insulated gate bipolar transistors; Jitter; Laser applications; Optical pulse generation; Power generation; Power lasers; Pulsed power supplies; Switches; Voltage control;

fLanguage

English

Publisher

ieee

Conference_Titel

Power Modulator Symposium, 2002 and 2002 High-Voltage Workshop. Conference Record of the Twenty-Fifth International

ISSN

1076-8467

Print_ISBN

0-7803-7540-8

Type

conf

DOI

10.1109/MODSYM.2002.1189552

Filename

1189552