DocumentCode :
3331198
Title :
Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.03CH37426)
fYear :
2003
fDate :
23-23 Jan. 2003
Abstract :
The following topics were discussed: nanodevices and NEMS, actuators; materials and characterisation; droplet control and biodevices; wireless communication and power MEMS; communication and resonators, design and analysis; particle separators; micro-optics; bio & chemical microsystems; sensors; mechanical and physical microsystems; fabrication technology; assembly and packaging.
Keywords :
biosensors; chemical sensors; micro-optics; microactuators; micromechanical devices; microsensors; nanotechnology; packaging; NEMS; actuators; analysis; assembly; biodevices; design; droplet control; fabrication technology; micro-optics; nanodevices; packaging; particle separators; power MEMS; resonators; sensors; wireless communication;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Conference_Location :
Kyoto, Japan
ISSN :
1084-6999
Print_ISBN :
0-7803-7744-3
Type :
conf
DOI :
10.1109/MEMSYS.2003.1189670
Filename :
1189670
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3331198
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