Title :
Nanotechnology for the future MEMS
Author_Institution :
ISIR-Sanken, Osaka Univ., Japan
Abstract :
My talk in this conference is mainly concerned with the bottom-up method which will open a new direction in MEMS fields. As a typical example of the researches, DNA nanotechnology combined with MEMS technique will be discussed. Single molecular imaging of DNA and its application to DNA electronic devices will be presented, and the future direction of DNA electronics combined with MEMS will be discussed.
Keywords :
DNA; biomolecular electronics; micromechanical devices; nanotechnology; DNA electronic devices; DNA single molecular imaging; bottom-up method; future MEMS; nanotechnology; Atomic force microscopy; Atomic measurements; DNA; Force measurement; Image resolution; Micromechanical devices; Nanoscale devices; Nanotechnology; Periodic structures; Tunneling;
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Print_ISBN :
0-7803-7744-3
DOI :
10.1109/MEMSYS.2003.1189672
