DocumentCode
3331247
Title
Nanotechnology for the future MEMS
Author
Kawai, Tomoji
Author_Institution
ISIR-Sanken, Osaka Univ., Japan
fYear
2003
fDate
19-23 Jan. 2003
Firstpage
1
Lastpage
3
Abstract
My talk in this conference is mainly concerned with the bottom-up method which will open a new direction in MEMS fields. As a typical example of the researches, DNA nanotechnology combined with MEMS technique will be discussed. Single molecular imaging of DNA and its application to DNA electronic devices will be presented, and the future direction of DNA electronics combined with MEMS will be discussed.
Keywords
DNA; biomolecular electronics; micromechanical devices; nanotechnology; DNA electronic devices; DNA single molecular imaging; bottom-up method; future MEMS; nanotechnology; Atomic force microscopy; Atomic measurements; DNA; Force measurement; Image resolution; Micromechanical devices; Nanoscale devices; Nanotechnology; Periodic structures; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-7744-3
Type
conf
DOI
10.1109/MEMSYS.2003.1189672
Filename
1189672
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