Title :
Chemo-mechanical actuator using self-oscillating gel for artificial cilia
Author :
Tabata, Osamu ; Kojima, Hirokazu ; Kasatani, Tetsuya ; Isono, Yoshitada ; Yoshida, Ryo
Author_Institution :
Dept. of Mech. Eng., Ritsumeikan Univ., Shiga, Japan
Abstract :
A chemo-mechanical actuator using self-oscillating polymer gel has been fabricated by a moving mask deep X-ray lithography (M2DXL) technique in combination with micro reactive molding technique. The actuator was composed of a polymer gel plate that has micro projection array (bottom diameter of 100 μm, height of 300 μm and pitch of 250 μm) on the surface. The elliptical motion of the micro projection top was confirmed for the first time. The FEM analysis revealed that the lateral and vertical motion of the projection top were mainly resulted from the propagation of the swelling-deswelling deformation of the base plate.
Keywords :
X-ray lithography; finite element analysis; microactuators; polymer gels; 100 micron; 250 micron; 300 micron; FEM analysis; M2DXL; artificial cilia; chemo-mechanical actuator; micro projection array; micro reactive molding; moving mask deep X-ray lithography; self-oscillating polymer gel; swelling-deswelling deformation; Actuators; Chemicals; Educational institutions; Mechanical engineering; Micromechanical devices; Motion analysis; Polymer gels; Self-assembly; Telephony; X-ray lithography;
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Print_ISBN :
0-7803-7744-3
DOI :
10.1109/MEMSYS.2003.1189675
