Chemo-mechanical actuator using self-oscillating gel for artificial cilia

Author

Tabata, Osamu ; Kojima, Hirokazu ; Kasatani, Tetsuya ; Isono, Yoshitada ; Yoshida, Ryo

Author_Institution

Dept. of Mech. Eng., Ritsumeikan Univ., Shiga, Japan

fYear

2003

fDate

19-23 Jan. 2003

Firstpage

12

Lastpage

15

Abstract

A chemo-mechanical actuator using self-oscillating polymer gel has been fabricated by a moving mask deep X-ray lithography (M²DXL) technique in combination with micro reactive molding technique. The actuator was composed of a polymer gel plate that has micro projection array (bottom diameter of 100 μm, height of 300 μm and pitch of 250 μm) on the surface. The elliptical motion of the micro projection top was confirmed for the first time. The FEM analysis revealed that the lateral and vertical motion of the projection top were mainly resulted from the propagation of the swelling-deswelling deformation of the base plate.

Keywords

X-ray lithography; finite element analysis; microactuators; polymer gels; 100 micron; 250 micron; 300 micron; FEM analysis; M²DXL; artificial cilia; chemo-mechanical actuator; micro projection array; micro reactive molding; moving mask deep X-ray lithography; self-oscillating polymer gel; swelling-deswelling deformation; Actuators; Chemicals; Educational institutions; Mechanical engineering; Micromechanical devices; Motion analysis; Polymer gels; Self-assembly; Telephony; X-ray lithography;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-7744-3

Type

conf

DOI

10.1109/MEMSYS.2003.1189675

Filename

1189675