Nanomechanics of ultrathin silicon beams and carbon nanotubes

The nanomechanical properties of single-crystalline silicon cantilevers and carbon nanotubes, as a resonating element are investigated. As the dimensions of a resonating mechanical structure decrease, the energy loss due to the surface effect increases, which results in the decrease of Q-factors. However, a thermal treatment for single-crystalline silicon in ultra-high vacuum dramatically changes their properties. In this paper the Q-factors, gas adsorption effect and nonlinearity of mechanical spring are investigated on ultrathin single crystalline silicon resonators. Also the thermal treatment effect on a carbon nanotube resonator is examined.