DocumentCode
3331499
Title
Nano wires by self assembly
Author
Saif, Taher ; Alaca, Erdem ; Sehitoglu, Huseyin
Author_Institution
Dept. of Mech. & Ind. Eng., Illinois Univ., Urbana, IL, USA
fYear
2003
fDate
19-23 Jan. 2003
Firstpage
45
Lastpage
47
Abstract
We present a technique to fabricate nano wires on silicon substrates without any lithography. The wires are 50 nm or less in width, but their lengths can be 10 s of micro meters. They can be formed by a single or multiple layers of metals. The wires can be designed to form a network which can be partially released from the substrate to form 3D structures. Such structures may serve as actuators or sensors.
Keywords
elemental semiconductors; microactuators; microsensors; nanowires; self-assembly; silicon; 3D structures; 50 nm; Si; actuators; nanowires; self assembly; sensors; silicon substrates; Connectors; Fabrication; Geometry; Industrial engineering; Lithography; Nickel; Self-assembly; Stress control; Substrates; Wires;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-7744-3
Type
conf
DOI
10.1109/MEMSYS.2003.1189683
Filename
1189683
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