DocumentCode
3331590
Title
A high-current electrothermal bistable MEMS relay
Author
Qui, J. ; Lang, Jeffrey H. ; Slocum, Alexander H. ; Strümpler, Ralf
Author_Institution
MIT, Cambridge, MA, USA
fYear
2003
fDate
19-23 Jan. 2003
Firstpage
64
Lastpage
67
Abstract
This paper reports the design, fabrication and testing of a thermally-actuated bistable MEMS relay. Mechanical bistability ensures zero actuation power in both the on and off states, and permits actuation with a transient thermal actuator. In the off state, this relay stands off more than 200 V. In the on state, it exhibits a minimum total resistance of 60 nΩ and a maximum current carrying capacity of 3 A. It switches with a maximum 5 Hz rate.
Keywords
microactuators; micromechanical devices; microrelays; 200 V; 3 A; 60 nohm; high-current electrothermal bistable MEMS relay; mechanical bistability; transient thermal actuator; Actuators; Contact resistance; Electrothermal effects; Etching; Fabrication; Micromechanical devices; Relays; Structural beams; Testing; Thermal force;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-7744-3
Type
conf
DOI
10.1109/MEMSYS.2003.1189688
Filename
1189688
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