Title :
Fabrication of a microvalve with piezoelectric actuation
Author :
Li, Hu Quan ; Steyn, Jasper L. ; Turner, K.T. ; Yaglioglu, Onnik
Author_Institution :
Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
The fabrication of an active MEMS micro valve driven by integrated bulk single crystal piezoelectric actuators is reported. The valve is a nine-layer structure of glass, Si, and silicon on insulator (SOI) assembled by wafer level fusion bonding and anodic bonding, die level anodic bonding and eutectic bonding. Valve head strokes as large as 20μm were realized through hydraulic amplification of small strokes of piezoelectric actuators. A flow rate of 0.21ml/s was obtained at 1 kHz. The fabrication, bonding and assembly processes, as well as some test results are described.
Keywords :
microvalves; piezoelectric actuators; silicon-on-insulator; wafer bonding; 1 kHz; SOI; Si-SiO2; active MEMS microvalve; anodic bonding; die level anodic bonding; eutectic bonding; fabrication; microvalve; piezoelectric actuation; piezoelectric actuators; wafer level fusion bonding; Assembly; Fabrication; Glass; Micromechanical devices; Microvalves; Piezoelectric actuators; Silicon on insulator technology; Testing; Valves; Wafer bonding;
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Print_ISBN :
0-7803-7744-3
DOI :
10.1109/MEMSYS.2003.1189695
