The micro ion drag pump using indium-tin-oxide (ITO) electrodes

Author

Yang, Lung-Jieh ; Wang, Jiun-Min ; Huang, Yu-Lin

Author_Institution

Dept. of Mech. & Electro-Mech. Eng., Tamkang Univ., Tamsui, Taiwan

fYear

2003

fDate

19-23 Jan. 2003

Firstpage

112

Lastpage

115

Abstract

This paper describes a micro ion drag pump, or an ejection type electro-hydrodynamic (EHD) micro pump, using Indium-Tin-Oxide (ITO) planar electrodes novelly. The ITO film for the electrodes makes anodic bonding easily and feasible in packaging the glass substrate (with ITO) hermetically with the silicon micro channels. Therefore, the scaling down or the miniaturization of ion drag pumps can be achieved herein. The ITO electrodes could drive the ethyl alcohol to have the maximum volumetric flow rate of 87 nl/min with applying a DC driving voltage of 40 Volts. More efforts and improvements on the pumping efficiency as well as the long-term stability of the ITO electrodes are acquired correspondingly.

Keywords

electrohydrodynamics; indium compounds; micropumps; tin compounds; 40 V; ITO; ITO electrodes; InSnO; anodic bonding; ejection type electro-hydrodynamic micro pump; ethyl alcohol; glass substrate; long-term stability; maximum volumetric flow rate; micro ion drag pump; packaging; pumping efficiency; Bonding; Electrodes; Glass; Hermetic seals; Indium tin oxide; Micropumps; Packaging; Semiconductor films; Silicon; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-7744-3

Type

conf

DOI

10.1109/MEMSYS.2003.1189700

Filename

1189700