Title :
A low loss MEMS transmission line with shielded ground
Author :
Park, Eun-Chul ; Choi, Yun-Suk ; Kim, Byeong-Il ; Yoon, Jun-Bo ; Yoon, Euisik
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea
Abstract :
This paper reports a MEMS transmission line with shielded ground realized using fully CMOS compatible, monolithically integrable 3-D RF MEMS processes. The fabricated transmission line has achieved extremely low loss by shielding the signal line from lossy silicon substrate at the bottom as well as from radiation into open air space above. A low loss of 0.35 dB/cm at 25 GHz has been achieved in the fabricated transmission lines.
Keywords :
high-frequency transmission lines; micromechanical devices; 25 GHz; extremely low loss; fully CMOS compatible; lossy Si substrate; low loss MEMS transmission line; shielded ground; Conducting materials; Conductivity; Coplanar waveguides; Dielectric losses; Dielectric substrates; Distributed parameter circuits; Micromechanical devices; Propagation losses; Silicon; Transmission lines;
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Print_ISBN :
0-7803-7744-3
DOI :
10.1109/MEMSYS.2003.1189705
