Integrated five-bit RF MEMS phase shifter for satellite broadcasting/communication systems

Author

Ko, Young J. ; Park, Jae Y. ; Kim, Hong T. ; Bu, Jong U.

Author_Institution

Mater. & Devices Lab., LG Electron. Inst. of Technol., Seoul, South Korea

fYear

2003

fDate

19-23 Jan. 2003

Firstpage

144

Lastpage

148

Abstract

In this paper, a fully integrated five-bit RF MEMS phase shifter with low insertion loss, narrow frequency band, and constant phase shift is designed, fabricated, and characterized for mobile satellite broadcasting/communication systems. The integrated five-bit phase shifter is comprised of CPW lines, air-gap overlay CPW couplers, and MEMS capacitive shunt switches. Phase shift can be obtained by changing the length of the short-ended stub with the MEMS switch, and the constant phase shift can be obtained by using the open-ended stub. The fabricated 5-bit phase shifter has insertion loss of avg. -5.25 dB, return loss of min. -10 dB, and phase error of avg. 3.5°, respectively. The utilized RF MEMS switches are operated at between 15 and 20 volts.

Keywords

coplanar waveguides; direct broadcasting by satellite; micromechanical devices; phase shifters; satellite communication; -5.25 dB; 15 to 20 V; CPW lines; MEMS capacitive shunt switches; air-gap overlay CPW couplers; constant phase shift; integrated five-bit RF MEMS phase shifter; low insertion loss; narrow frequency band; satellite broadcasting/communication systems; short-ended stub; Air gaps; Coplanar waveguides; Couplers; Frequency; Insertion loss; Micromechanical devices; Phase shifters; Radiofrequency microelectromechanical systems; Satellite broadcasting; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-7744-3

Type

conf

DOI

10.1109/MEMSYS.2003.1189707

Filename

1189707