Title :
Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMS
Author :
Futai, Nohuyuki ; Matsumoto, Kiyoshi ; Shimoyama, Isao
Author_Institution :
Dept. of Mechano-Informatics, Univ. of Tokyo, Japan
Abstract :
A micromachined planar spiral inductor was created for the use of a passive mechanoreceptor element in a practical skin-like tactile sensor. This paper shows the results of a simulation of the receptor element that changes inductance when largely deformed. We also report a modified method of fabrication that improves durability dramatically. Finally, we evaluated the validation of the simulation method.
Keywords :
digital simulation; inductors; mechanoception; micromachining; microsensors; skin; tactile sensors; PDMS; durability; fabrication; microinductor-based artificial tactile mechanoreceptor; micromachined planar spiral inductor; passive mechanoreceptor element; simulation; skin-like tactile sensor; validation; Acoustic sensors; CMOS image sensors; Deformable models; Fabrication; Inductance; Inductors; Resonance; Spirals; Tactile sensors; Wireless sensor networks;
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Print_ISBN :
0-7803-7744-3
DOI :
10.1109/MEMSYS.2003.1189722
