• DocumentCode
    3332252
  • Title

    A first look into plasma-plasma interaction at atmospheric pressure via numerical simulation

  • Author

    Wollny, Alexander ; Hemke, Torben ; Gebhardt, Markus ; Mussenbrock, Thomas ; Brinkmann, Ralf Peter

  • Author_Institution
    Center for Plasma Sci. & Technol., Ruhr-Univ. Bochum, Bochum, Germany
  • fYear
    2010
  • fDate
    20-24 June 2010
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    Summary form only given. The micro plasma array developed by J.G. Eden and co-workers consists of a matrix of hollow cathode discharges of the size of a few ten micro meters. A silicon substrate with inverse pyramidal cavities is used as one electrode. The second electrode, separated by a dielectrica, covers the space between cavities. The whole structure is covered with a second dielectric layer. The discharges are driven by a sinusoidal voltage at a frequency of 10-100 kHz in atmospheric pressure Argon. Experiments performed by Schulz-von der Gathen and co-workers show strong interactions between the the micro discharges. The fundamental phenomenon is still unclear. This contribution is intended to show a first look into the modeling and simulation of micro plasma array and the plasma-plasma interaction.
  • Keywords
    argon; discharges (electric); plasma collision processes; plasma simulation; silicon; Ar; Si; atmospheric pressure; dielectric layer; frequency 10 kHz to 100 kHz; hollow cathode discharge; inverse pyramidal cavity; microplasma array; numerical simulation; plasma-plasma interaction; pressure 1 atm; silicon substrate; Atmospheric modeling; Atmospheric-pressure plasmas; Cathodes; Dielectric substrates; Electrodes; Frequency; Numerical simulation; Plasma simulation; Silicon; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 2010 Abstracts IEEE International Conference on
  • Conference_Location
    Norfolk, VA
  • ISSN
    0730-9244
  • Print_ISBN
    978-1-4244-5474-7
  • Electronic_ISBN
    0730-9244
  • Type

    conf

  • DOI
    10.1109/PLASMA.2010.5534168
  • Filename
    5534168