A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application

This paper presents a novel fabrication method of in-channel three-dimensional micromesh structures using the conventional photolithography. The micromesh was realized by exposing UV light from the backside of the SU-8 coated metal-patterned glass substrate for different angles. Numbers of exposure and irradiation angle decided the shape and the size of micromesh. Based on this technique, three different micromesh-inserted microchannel structures were fabricated. For hydrodynamic characterization, their flow resistances were measured. Finally, for the application of micro total analysis system (μTAS), the microfilter was fabricated and its filtering property was demonstrated.