Title :
2 axes optical switch with holding mechanism
Author :
Baba, Akiyoshi ; Okana, H. ; Uetsuka, Hisato ; Esashi, Masayoshi
Author_Institution :
Hitachi Cable Ltd., Ibaraki, Japan
Abstract :
An optical switch which has a ratchet system to hold micro-mirrors without electric power has been studied. The micro-mirrors are supported by 2 axes torsion-bars and driven by Lorentz force caused by external magnetic field and coil current. The maximum tilted mirror angle of 23 degrees was obtained. The ratchets are Si beams, which are distorted by shrinkage of cured polyimide, and the micro-mirrors are symmetrically held between the beams. It was confirmed that the ratchets worked well to hold the micro-mirrors. The minor was completely released by bending the beams thermally with electric current.
Keywords :
micro-optics; micromirrors; optical switches; 2 axes optical switch; Lorentz force; coil current; cured polyimide; distorted; external magnetic field; holding mechanism; maximum tilted mirror angle; micro-mirrors; ratchet system; shrinkage; Arm; Coils; Current; High speed optical techniques; Lorentz covariance; Mirrors; Optical beams; Optical distortion; Optical switches; Polyimides;
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Print_ISBN :
0-7803-7744-3
DOI :
10.1109/MEMSYS.2003.1189733
