A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch

Author

Kim, Ji-Hyuk ; Lee, Hyune-Kew ; Kim, Byung-Il ; Jeon, Jin-Wan ; Yoon, Jun-Bo ; Yoon, Euisik

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea

fYear

2003

fDate

19-23 Jan. 2003

Firstpage

259

Lastpage

262

Abstract

A high-fill factor micro-mirror for two-axis operation has been designed, analyzed, and fabricated by using electroplated copper and thick photoresist sacrificial mold. The fabricated mirror has crossbar springs under the mirror plate for two-axis operation in order to achieve a high-fill factor. The maximum actuation angle before pull-in in the fabricated device has been measured as 2.65° at 244 V. This shows good agreement with analysis and simulation results. The radius of curvature and RMS surface roughness of the mirror plate have been measured as 3.8 cm and 12 nm, respectively.

Keywords

copper; electrodeposits; electrostatic actuators; micromirrors; photoresists; surface topography; 12 nm; 244 V; 3.8 cm; Cu; RMS surface roughness; crossbar springs; crossbar torsion spring; electroplated Cu; electrostatically-actuated two-axis operation; high fill-factor micro-mirror; high-fill factor; large-scale optical switch; maximum actuation angle; mirror plate; radius of curvature; thick photoresist sacrificial mold; two-axis operation; Copper; Electrodes; Large-scale systems; Micromechanical devices; Mirrors; Optical fiber networks; Optical surface waves; Optical switches; Resists; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-7744-3

Type

conf

DOI

10.1109/MEMSYS.2003.1189735

Filename

1189735