Title :
Parallel and series multiple microchannel systems
Author :
Cheng, Kan Bun ; Wong, Man ; Zohar, Yitshak
Author_Institution :
Dept. of Mech. Eng., Hong Kong Univ. of Sci. & Technol., Kowloon, China
Abstract :
Microfluidic systems typically involve more than one microchannel. The simplest multiple microchannel systems can be classified into series or parallel flows. In this work, gas flow in complex microsystems of multiple channels, connected in parallel and in series, has been experimentally investigated and theoretically analysed for the first time. A set of microchannels connected in parallel and series have been successfully fabricated using standard micromachining techniques. Mass flow rate and pressure distribution measurements have been conducted using Argon gas and compared with calculations based on a simple two-dimensional model, taken into account both compressibility and slip flow effects. Pressure distributions along the microchannel systems have shown good agreement with the theoretical calculations.
Keywords :
channel flow; compressible flow; flow measurement; microfluidics; complex microsystems; gas flow; mass flow rate; microfluidic systems; multiple channels; parallel multiple microchannel systems; pressure distribution measurements; series multiple microchannel systems; standard micromachining techniques; Argon; Boundary conditions; Circuits; Contact resistance; Electric resistance; Fluid flow; Fluid flow measurement; Microchannel; Microfluidics; Pressure measurement;
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Print_ISBN :
0-7803-7744-3
DOI :
10.1109/MEMSYS.2003.1189743