• DocumentCode
    3332612
  • Title

    Parallel and series multiple microchannel systems

  • Author

    Cheng, Kan Bun ; Wong, Man ; Zohar, Yitshak

  • Author_Institution
    Dept. of Mech. Eng., Hong Kong Univ. of Sci. & Technol., Kowloon, China
  • fYear
    2003
  • fDate
    19-23 Jan. 2003
  • Firstpage
    291
  • Lastpage
    294
  • Abstract
    Microfluidic systems typically involve more than one microchannel. The simplest multiple microchannel systems can be classified into series or parallel flows. In this work, gas flow in complex microsystems of multiple channels, connected in parallel and in series, has been experimentally investigated and theoretically analysed for the first time. A set of microchannels connected in parallel and series have been successfully fabricated using standard micromachining techniques. Mass flow rate and pressure distribution measurements have been conducted using Argon gas and compared with calculations based on a simple two-dimensional model, taken into account both compressibility and slip flow effects. Pressure distributions along the microchannel systems have shown good agreement with the theoretical calculations.
  • Keywords
    channel flow; compressible flow; flow measurement; microfluidics; complex microsystems; gas flow; mass flow rate; microfluidic systems; multiple channels; parallel multiple microchannel systems; pressure distribution measurements; series multiple microchannel systems; standard micromachining techniques; Argon; Boundary conditions; Circuits; Contact resistance; Electric resistance; Fluid flow; Fluid flow measurement; Microchannel; Microfluidics; Pressure measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-7744-3
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2003.1189743
  • Filename
    1189743