DocumentCode
3332662
Title
In-channel micromechanical drag flow sensor with electronic readout
Author
Radhakrishnan, Shankar ; Lal, Amit
Author_Institution
SonicMEMS Lab., Cornell Univ., Ithaca, NY, USA
fYear
2003
fDate
19-23 Jan. 2003
Firstpage
307
Lastpage
310
Abstract
We report an in-channel microbeam flow sensor with electronic readout that utilizes drag forces to measure flow rates at low Reynolds numbers. The flow sensor converts the moment of a bent beam into differential strain across a Wheatstone-bridge under the anchor of the beam. The flowsensor has sensitivities of 0.5 μVN/(nl/s). Given the thermal noise of the Wheatstone-bridge to be 80nV/√Hz, the flow sensor can measure flow rates as low as 4.2 nl/min.
Keywords
drag; flow measurement; microfluidics; microsensors; Wheatstone-bridge; bent beam; differential strain; electronic readout; flow rates; in-channel micromechanical drag flow sensor; low Reynolds numbers; thermal noise; Analytical models; Capacitive sensors; Drag; Equations; Fluid flow measurement; Force sensors; Microfluidics; Micromechanical devices; Nickel; Piezoresistance;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-7744-3
Type
conf
DOI
10.1109/MEMSYS.2003.1189747
Filename
1189747
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