Title :
In-channel micromechanical drag flow sensor with electronic readout
Author :
Radhakrishnan, Shankar ; Lal, Amit
Author_Institution :
SonicMEMS Lab., Cornell Univ., Ithaca, NY, USA
Abstract :
We report an in-channel microbeam flow sensor with electronic readout that utilizes drag forces to measure flow rates at low Reynolds numbers. The flow sensor converts the moment of a bent beam into differential strain across a Wheatstone-bridge under the anchor of the beam. The flowsensor has sensitivities of 0.5 μVN/(nl/s). Given the thermal noise of the Wheatstone-bridge to be 80nV/√Hz, the flow sensor can measure flow rates as low as 4.2 nl/min.
Keywords :
drag; flow measurement; microfluidics; microsensors; Wheatstone-bridge; bent beam; differential strain; electronic readout; flow rates; in-channel micromechanical drag flow sensor; low Reynolds numbers; thermal noise; Analytical models; Capacitive sensors; Drag; Equations; Fluid flow measurement; Force sensors; Microfluidics; Micromechanical devices; Nickel; Piezoresistance;
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Print_ISBN :
0-7803-7744-3
DOI :
10.1109/MEMSYS.2003.1189747
