Title :
Fabrication of micro cell counter with boron diffused resistor
Author :
Son, Sanguk ; Choi, Yo Han ; Lee, Seung S.
Author_Institution :
Dept. of Mech. Eng., Pohang Univ. of Sci. & Technol., South Korea
Abstract :
This paper describes a novel cell counting method with a boron diffused resistor. It utilizes the photoconductive property of boron and Bio-MEMS technology. When cells shade the boron resistor from light by passing over a window, signals are generated due to the resistance changes of the boron resistor. Fabrication of two kinds of devices, having windows of silicon dioxide layer and silicon nitride membrane, and discussions on counting experiments with cells and micro beads are presented. Proposed method can be used in a micro cell counter or a LOC (Lab-on-a-chip).
Keywords :
cellular biophysics; micromechanical devices; microsensors; photoconductivity; B diffused resistor; Lab-on-a-chip; Si3N4; Si3N4 membrane; SiO2; SiO2 layer; bio-MEMS technology; micro cell counter; photoconductive property; resistance changes; Biomembranes; Boron; Counting circuits; Fabrication; Immune system; Lab-on-a-chip; Photoconductivity; Resistors; Signal generators; Silicon compounds;
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Print_ISBN :
0-7803-7744-3
DOI :
10.1109/MEMSYS.2003.1189748
