Thin-film waveguide with lens effect terminal for optical sensing device

Author

Kan, Tetsuo ; Matsumoto, Kiyoshi ; Shimoyama, Isao

Author_Institution

Dept. of Mechano-Informatics, Univ. of Tokyo, Japan

fYear

2003

fDate

19-23 Jan. 2003

Firstpage

315

Lastpage

318

Abstract

We have developed a thin-film optical waveguide, which is capable of condensing light at an input terminal of the waveguide. This effect was achieved by shaping an end of the waveguide with a curvature. The input terminal works as a lens by this curvature. The curvature of the lens is controllable by changing a radius of the terminal. The waveguides are composed of under-cladding, core, and over-cladding layers. All of them have been made of fluorinated polyimides. The lens effect of the waveguide improved the resolution. The resolutions of the waveguides with circular terminal (radii of 500, 800 [μm]) were superior to the one with flat terminal by about 20%.

Keywords

fibre optic sensors; lenses; optical waveguides; polymers; 500 micron; 800 micron; fluorinated polyimides; lens curvature; lens effect terminal; optical sensing device; thin-film optical waveguide; Chemicals; Fluorescence; Lenses; Optical fibers; Optical films; Optical sensors; Optical waveguides; Polyimides; Thin film devices; Thin film sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-7744-3

Type

conf

DOI

10.1109/MEMSYS.2003.1189749

Filename

1189749