• DocumentCode
    3332847
  • Title

    Light actuated microfluidic devices

  • Author

    Chiou, Pei Yu ; Chang, Zehao ; Wu, Ming C.

  • Author_Institution
    Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
  • fYear
    2003
  • fDate
    19-23 Jan. 2003
  • Firstpage
    355
  • Lastpage
    358
  • Abstract
    A light-actuated microfluidic device has been successfully fabricated to inject, move, separate, and merge liquid droplets with nano-liter volumes. Light actuation is realized by sandwiching the liquid droplets between two photosensitive surfaces whose wettability can be changed by light. By integrating a photoconductor with an electrowetting electrode, the surface tension at the liquid/solid interface above the electrode can be modified by shining an optical beam on the photoconductor. The surface tension change is reversible and has a fast response time (millisecond). The liquid droplets follow the optical beam path up to a speed of 78 nm/sec. All optical actuation for complete liquid droplet functions has been achieved. Simultaneous manipulation of multiple droplets is also demonstrated.
  • Keywords
    drops; microactuators; microfluidics; surface tension; wetting; light actuated microfluidic devices; liquid droplets; liquid/solid interface; optical actuation; photosensitive surfaces; surface tension; wettability; Biomedical optical imaging; Delay; Electrodes; Microfluidics; Optical beams; Optical pumping; Photoconductivity; Surface morphology; Surface resistance; Surface tension;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-7744-3
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2003.1189759
  • Filename
    1189759