Title :
3D flexible multichannel probe array
Author :
Takeuchi, Shoji ; Suzuki, Takafumi ; Mabuchi, Kunihiko ; Fujita, Hiroyuki
Author_Institution :
Center for Int. Res. on Micro Mechatronics, Univ. of Tokyo, Japan
Abstract :
A 3D flexible multichannel micro probe array is proposed. Since each probe has several recording pads, the probe array can measure neural activity at various depths in the brain. They can be easily fabricated with the interconnections, using the folding process of planar probe structures. This flexible probe array can be inserted into a rat´s brain without fracture and has successfully measured neural signals.
Keywords :
biosensors; brain; microsensors; 3D flexible multichannel probe array; brain; neural activity; planar probe structures; Assembly; Brain; Electrodes; Fabrication; Magnetic fields; Microelectromechanical devices; Micromachining; Polyimides; Probes; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Print_ISBN :
0-7803-7744-3
DOI :
10.1109/MEMSYS.2003.1189762
