Title :
High speed lensless integrated proximity sensor
Author :
Chapman, G.H. ; Bergen, D.E.
Author_Institution :
Sch. of Eng. Sci., Simon Fraser Univ., Burnaby, BC, Canada
Abstract :
An integrated sensor array has been developed using lensless techniques that produces a high accuracy proximity measurement from contact to 18 mm. An integrated optical detector and processing circuitry chip was developed for this application. It locates the brightest spot within an optical array which will output the proximity position every 5.3 μs
Keywords :
arrays; high-speed optical techniques; integrated optics; optical sensors; position measurement; 5.3 mus; high speed lensless integrated proximity sensor; optical detector array; position measurement; processing circuitry chip; Circuits; High speed optical techniques; Optical arrays; Optical refraction; Optical sensors; Photodetectors; Semiconductor device measurement; Sensor arrays; Skin; Surface emitting lasers;
Conference_Titel :
Innovative Systems in Silicon, 1997. Proceedings., Second Annual IEEE International Conference on
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-4276-3
DOI :
10.1109/ICISS.1997.630253
