• DocumentCode
    3333297
  • Title

    Characteristics of the liquid metal ion source with a suppressor and its advantages

  • Author

    Byeong Seong Cho ; Oh, H.J. ; Song, K.B. ; Kang, S.O. ; Choi, E.H.

  • Author_Institution
    Dept. of Electrophys., Kwangwoon Univ., Seoul, South Korea
  • fYear
    2010
  • fDate
    20-24 June 2010
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    The liquid metal ion sources (LMIS) in FIB system have many advantages of high current density, high brightness and low ion energy spread. Most FIB systems use LMIS because the ion beam spot size of LMIS is smaller than of gas field ionization sources (GFIS). LMIS basically consists of an emitter (needle, anode), a reservoir (gallium) and an extractor (cathode). But several LMIS have new electrode called the suppressor.
  • Keywords
    ion sources; liquid metals; plasma sources; emission current; ion beam stability; liquid metal ion source; suppressor voltage; threshold voltage; Anodes; Brightness; Cathodes; Current density; Electrodes; Ion beams; Ion sources; Ionization; Needles; Reservoirs;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 2010 Abstracts IEEE International Conference on
  • Conference_Location
    Norfolk, VA
  • ISSN
    0730-9244
  • Print_ISBN
    978-1-4244-5474-7
  • Electronic_ISBN
    0730-9244
  • Type

    conf

  • DOI
    10.1109/PLASMA.2010.5534232
  • Filename
    5534232
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3333297