Title :
Characteristics of the liquid metal ion source with a suppressor and its advantages
Author :
Byeong Seong Cho ; Oh, H.J. ; Song, K.B. ; Kang, S.O. ; Choi, E.H.
Author_Institution :
Dept. of Electrophys., Kwangwoon Univ., Seoul, South Korea
Abstract :
The liquid metal ion sources (LMIS) in FIB system have many advantages of high current density, high brightness and low ion energy spread. Most FIB systems use LMIS because the ion beam spot size of LMIS is smaller than of gas field ionization sources (GFIS). LMIS basically consists of an emitter (needle, anode), a reservoir (gallium) and an extractor (cathode). But several LMIS have new electrode called the suppressor.
Keywords :
ion sources; liquid metals; plasma sources; emission current; ion beam stability; liquid metal ion source; suppressor voltage; threshold voltage; Anodes; Brightness; Cathodes; Current density; Electrodes; Ion beams; Ion sources; Ionization; Needles; Reservoirs;
Conference_Titel :
Plasma Science, 2010 Abstracts IEEE International Conference on
Conference_Location :
Norfolk, VA
Print_ISBN :
978-1-4244-5474-7
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2010.5534232
