An automated noise measurement system for packaged VLSI metal thin films

An approach to automating the noise measurement procedure for packaged VLSI metal films is described. The automation of noise measurements required that compromises be made with the traditional noise measurement system. Relays are used in place of many of the soldered interconnections of the traditional system. Heating of the metal films is accomplished through use of a several `hot chucks´. The hot chucks used are high-power resistors that easily dissipate heat when DC current is supplied. A piezoelectric vibration detection system was designed and fabricated to monitor seismic occurrences during the measurement process. To control the automated measurement system a script language referred to as ANIMAL (automated noise measurement language) is being written to control the system through a series of stored commands